Near–Room Temperature Thermal CVD of SiO2 Films

Near–Room Temperature Thermal CVD of SiO2 Films

Jay J. Senkevich, Seshu B. Desu
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Volume:
4
Year:
1998
Language:
english
Pages:
3
DOI:
10.1002/(sici)1521-3862(199805)04:033.0.co;2-c
File:
PDF, 171 KB
english, 1998
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