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CVD in Hot Wall Reactors—The Interaction Between Homogeneous Gas-Phase and Heterogeneous Surface Reactions
Klaus J. HüttingerVolume:
4
Year:
1998
Language:
english
Pages:
8
DOI:
10.1002/(sici)1521-3862(199807)04:043.0.co;2-2
File:
PDF, 348 KB
english, 1998