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Determination of the Kinetics of CVD in Hot Wall Reactors
Z. J. Hu, K. J. HüttingerVolume:
6
Year:
2000
Language:
english
Pages:
6
DOI:
10.1002/(sici)1521-3862(200004)6:23.0.co;2-0
File:
PDF, 373 KB
english, 2000