Effect of Silicon Oxide Thickness on theDirect Synthesis of...

Effect of Silicon Oxide Thickness on theDirect Synthesis of Dimethyldichlorosilane

Sefa Yilmaz, Nicole Floquet, John L. Falconer
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Volume:
159
Year:
1996
Language:
english
Pages:
10
DOI:
10.1006/jcat.1996.0061
File:
PDF, 345 KB
english, 1996
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