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Radiofrequency spark source mass spectrometric analysis of oxygen in undoped silicon crystals and of carbon in undoped and carbon doped gallium arsenide crystals
B. Wiedemann, K. Bethge, W. Schütze, U. Lambert, S. Pahlke, T. Reinhold, B. Weinert, T. FladeVolume:
350
Language:
english
Pages:
4
DOI:
10.1007/bf00322489
Date:
October, 1994
File:
PDF, 454 KB
english, 1994