TOF-SIMS and FT-IR investigations of surface modified...

TOF-SIMS and FT-IR investigations of surface modified silicon wafers — porous silicon

R. Dietrich, J. Grobe, K. Meyer, B. Hagenhoff, A. Benninghoven
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Volume:
349
Language:
english
Pages:
2
DOI:
10.1007/bf00323283
Date:
May, 1994
File:
PDF, 125 KB
english, 1994
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