A capacitance transducer for thickness measurements on thin...

A capacitance transducer for thickness measurements on thin insulating films

V. M. Kurbatov, Yu. P. Presnyakov
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Volume:
17
Language:
english
Pages:
3
DOI:
10.1007/bf00814386
Date:
November, 1974
File:
PDF, 175 KB
english, 1974
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