The effect of the substrate temperature on the doping level of epitaxial layers of GaA s and on the distribution of impurity in them
L. G. Lavrent'eva, M. D. Vilisova, N. E. Zelenskaya, F. A. Kuznetsov, Yu. M. RumyantsevVolume:
14
Language:
english
Pages:
2
DOI:
10.1007/bf00819623
Date:
December, 1971
File:
PDF, 148 KB
english, 1971