Sputtered-atom energy relaxation in a plasma
A. G. Zhiglinskii, A. M. Izmailov, V. V. Kuchinskii, E. G. SheikinVolume:
25
Language:
english
Pages:
5
DOI:
10.1007/bf00891653
Date:
October, 1982
File:
PDF, 376 KB
english, 1982