Dependence of the rate of growth of epitaxial layers of...

Dependence of the rate of growth of epitaxial layers of indium arsenide on the temperature of deposition in the system in As-AsC13-H2

G. A. Aleksandrova, I. V. Ivonin, L. M. Krasil'nikova, L. G. Lavrent'eva, P. B. Paschenko, A. E. Shubin
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Volume:
27
Language:
english
Pages:
5
DOI:
10.1007/bf00898605
Date:
May, 1984
File:
PDF, 467 KB
english, 1984
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