Dependence of the rate of growth of epitaxial layers of indium arsenide on the temperature of deposition in the system in As-AsC13-H2
G. A. Aleksandrova, I. V. Ivonin, L. M. Krasil'nikova, L. G. Lavrent'eva, P. B. Paschenko, A. E. ShubinVolume:
27
Language:
english
Pages:
5
DOI:
10.1007/bf00898605
Date:
May, 1984
File:
PDF, 467 KB
english, 1984