Stresses in Silicon after Boron Diffusion (I). Determination of Residual Stresses in Boron-diffused Silicon Slices Using Lang's Method
Prof. Dr. O. Brümmer, Dipl.-Phys. H. R. HöcheVolume:
4
Year:
1969
Language:
english
Pages:
7
DOI:
10.1002/crat.19690040211
File:
PDF, 435 KB
english, 1969