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The X-ray method for the determination of damaged layer thickness of the Si crystal surface
Prof. Dr. J. Auleytner, J. Bak, Z. Furmanik, M. Maciaszek, A. SaulewiczVolume:
15
Year:
1980
Language:
english
Pages:
4
DOI:
10.1002/crat.19800150310
File:
PDF, 242 KB
english, 1980