Generation of dislocations on polished surfaces of...

Generation of dislocations on polished surfaces of dislocation free silicon wafers

Dr.-Ing. W. Fischer, Doz. Dr. sc. techn. G. Heymann
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Volume:
15
Year:
1980
Language:
english
Pages:
7
DOI:
10.1002/crat.19800150411
File:
PDF, 349 KB
english, 1980
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