Effect of oxygen partial pressure on silicon single crystal growth by floating zone technique: surface oxidation and Marangoni flow
Taketoshi Hibiya, Yoshihiko Asai, Masanobu Sumiji, Toshiya KojimaVolume:
38
Year:
2003
Language:
english
Pages:
8
DOI:
10.1002/crat.200310076
File:
PDF, 176 KB
english, 2003