Surface preparation of AlN substrates
X. F. Chen, D. Siche, M. Albrecht, C. Hartmann, J. Wollweber, X. G. XuVolume:
43
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/crat.200800057
File:
PDF, 221 KB
english, 2008