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Formation and Properties of Copper Silicide Precipitates in Silicon
M. Seibt, M. Griess, A. A. Istratov, H. Hedemann, A. Sattler, W. SchröterVolume:
166
Year:
1998
Language:
english
Pages:
12
DOI:
10.1002/(sici)1521-396x(199803)166:13.0.co;2-2
File:
PDF, 396 KB
english, 1998