Improvement of crystal quality of AlN grown on sapphire...

Crystal Research and Technology 2010 Vol. 45; Iss. 7

Improvement of crystal quality of AlN grown on sapphire substrate by MOCVD

Mu-Jen Lai, Liann-Be Chang, Tzu-Tao Yuan, Ray-Ming Lin
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Volume:
45
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/crat.201000063
File:
PDF, 142 KB
english, 2010
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