Deformation state of 49BF-implanted Si wafers after...

Crystal Research and Technology 1985 Vol. 20; Iss. 9

Deformation state of 49BF-implanted Si wafers after high-temperature thermal annealing

Dr. I. S. Vassilev, Dr. I. N. Petrov, P. A. Botev, Dr. Z. Furmanik, Prof. Dr. J. Auleytner
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Volume:
20
Year:
1985
Language:
english
Pages:
5
DOI:
10.1002/crat.2170200923
File:
PDF, 287 KB
english, 1985
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