Suppression of epitaxial silicon layer doping with boron in...

Suppression of epitaxial silicon layer doping with boron in the presence of hydrogen chloride

Th. Morgenstern, Dr. H. Kühne, G. A. Kokovin, N. A. Testova, A. A. Titov
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Volume:
22
Year:
1987
Language:
english
Pages:
9
DOI:
10.1002/crat.2170220119
File:
PDF, 460 KB
english, 1987
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