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Suppression of epitaxial silicon layer doping with boron in the presence of hydrogen chloride
Th. Morgenstern, Dr. H. Kühne, G. A. Kokovin, N. A. Testova, A. A. TitovVolume:
22
Year:
1987
Language:
english
Pages:
9
DOI:
10.1002/crat.2170220119
File:
PDF, 460 KB
english, 1987