X-ray diffraction study of TiN coatings sputtered at...

Crystal Research and Technology 1988 Vol. 23; Iss. 12

X-ray diffraction study of TiN coatings sputtered at different substrate temperatures

V. Valvoda, R. Kužel Jr., R. Černý, L. Dobiášová, J. Musil, V. Poulek
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Volume:
23
Year:
1988
Language:
english
Pages:
10
DOI:
10.1002/crat.2170231214
File:
PDF, 543 KB
english, 1988
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