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Laser annealing of GaAs dual implanted with Si and P ions
V. Rybka, V. Odzhayev, J. Červená, V. Hnatowicz, J. Kvítek, H. JelínkováVolume:
37
Year:
1987
Language:
english
Pages:
5
DOI:
10.1007/bf01596990
File:
PDF, 246 KB
english, 1987