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Formation of Transition Metal Nitrides by Rapid Thermal Processing (RTP)
I. Galesic, C. Angelkort, H. Lewalter, A. Berendes, B.O. KolbesenVolume:
177
Year:
2000
Language:
english
Pages:
12
DOI:
10.1002/(sici)1521-396x(200001)177:13.0.co;2-d
File:
PDF, 340 KB
english, 2000