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Plasma-Beam Discharge with a Pipe-like Electron Beam as the Generator of Large Flows of Active Radicals
V. M. Atamanov, G. B. Levadny, A. A. Ivanov, Y. F. Nasedkin, Y. V. Sereda, A. A. Serov, N. N. TimchenkoVolume:
22
Year:
1982
Language:
english
Pages:
7
DOI:
10.1002/ctpp.19820220607
File:
PDF, 384 KB
english, 1982