Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma
K. Mašek, L. Láska, R. D'Agostino, F. CramarossaVolume:
27
Year:
1987
Language:
english
Pages:
7
DOI:
10.1002/ctpp.19870270103
File:
PDF, 318 KB
english, 1987