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Prospects of Phase Resolved Optical Emission Spectroscopy as a Powerful Diagnostic Tool for RF-Discharges
T. Gans, V. Schulz-von der Gathen, H. F. DöbeleVolume:
44
Year:
2004
Language:
english
Pages:
6
DOI:
10.1002/ctpp.200410074
File:
PDF, 236 KB
english, 2004