Simulation of Hydrocarbon Redeposition on Plasma Shadowed...

Simulation of Hydrocarbon Redeposition on Plasma Shadowed Areas

K. Inai, K. Ohya
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Volume:
48
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/ctpp.200810048
File:
PDF, 460 KB
english, 2008
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