Modelling of Voids in Complex Radio Frequency Plasmas

Modelling of Voids in Complex Radio Frequency Plasmas

W.J. Goedheer, V. Land, J. Venema
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Volume:
49
Year:
2009
Language:
english
Pages:
16
DOI:
10.1002/ctpp.200910023
File:
PDF, 585 KB
english, 2009
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