On the Causes and Effects of Contaminations during rf Diode Deposition of Cr-Si Alloys
G. Sobe, H. Schreiber, G. Weise, A. HeinrichVolume:
33
Year:
1993
Language:
english
Pages:
11
DOI:
10.1002/ctpp.2150330411
File:
PDF, 568 KB
english, 1993