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The Interaction of the Supersonic Plasma-Jet with the Substrate in the RF Plasma-Chemical Reactor
M. Šícha, Z. Hubička, M. Tichý, M. Novák, L. Soukup, L. Jastrabík, J. F. Behnke, V. Kapička, K. Kapoun, M. ŠerýVolume:
36
Year:
1996
Language:
english
Pages:
7
DOI:
10.1002/ctpp.2150360506
File:
PDF, 643 KB
english, 1996