Studies of Silicon Erosion in Plasma-Target-Interaction...

Studies of Silicon Erosion in Plasma-Target-Interaction from Optical Emission and Absorption Spectroscopy

H. Jentschke, U. Schumacher, K. Hirsch
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Volume:
38
Year:
1998
Language:
english
Pages:
12
DOI:
10.1002/ctpp.2150380404
File:
PDF, 612 KB
english, 1998
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