Studies of Silicon Erosion in Plasma-Target-Interaction from Optical Emission and Absorption Spectroscopy
H. Jentschke, U. Schumacher, K. HirschVolume:
38
Year:
1998
Language:
english
Pages:
12
DOI:
10.1002/ctpp.2150380404
File:
PDF, 612 KB
english, 1998