Amine-stabilized cyclopentadienyl diisobutyl aluminum complexes as new kinds of precursors for the deposition of thin aluminum films by CVD
Dr. Markus Scherer, Prof. Thomas KruckVolume:
3
Year:
1997
Language:
english
Pages:
3
DOI:
10.1002/cvde.19970030105
File:
PDF, 440 KB
english, 1997