Amine-stabilized cyclopentadienyl diisobutyl aluminum...

Amine-stabilized cyclopentadienyl diisobutyl aluminum complexes as new kinds of precursors for the deposition of thin aluminum films by CVD

Dr. Markus Scherer, Prof. Thomas Kruck
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3
Year:
1997
Language:
english
Pages:
3
DOI:
10.1002/cvde.19970030105
File:
PDF, 440 KB
english, 1997
Conversion to is in progress
Conversion to is failed