Volatile Metal β-Diketonates: ALE and CVD precursors for electroluminescent device thin films
Dr. Marja Tiitta, Prof. Lauri NiinistouVolume:
3
Year:
1997
Language:
english
Pages:
16
DOI:
10.1002/cvde.19970030404
File:
PDF, 1.81 MB
english, 1997