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Copper Penetration into Porous Ultra-low-κ Methyl Silsesquioxane during Selective CVD
C. Jezewski, W.A. Lanford, J.J. Senkevich, D. Ye, T.-M. Lu, C. JinVolume:
9
Year:
2003
Language:
english
Pages:
3
DOI:
10.1002/cvde.200304155
File:
PDF, 228 KB
english, 2003