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Electrical Measurements and Optical Emission Spectroscopy of Silicon–Carbon Alloys Grown by PACVD: Correlation with Film Microstructure
L. Thomas, E. Tomasella, J.M. Badie, R. Berjoan, M. DucarroirVolume:
9
Year:
2003
Language:
english
Pages:
9
DOI:
10.1002/cvde.200306233
File:
PDF, 443 KB
english, 2003