Electrical Measurements and Optical Emission Spectroscopy...

Electrical Measurements and Optical Emission Spectroscopy of Silicon–Carbon Alloys Grown by PACVD: Correlation with Film Microstructure

L. Thomas, E. Tomasella, J.M. Badie, R. Berjoan, M. Ducarroir
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9
Year:
2003
Language:
english
Pages:
9
DOI:
10.1002/cvde.200306233
File:
PDF, 443 KB
english, 2003
Conversion to is in progress
Conversion to is failed