Plasma-Assisted Atomic Layer Deposition of Palladium
G. A. Ten Eyck, J. J. Senkevich, F. Tang, D. Liu, S. Pimanpang, T. Karaback, G.-C. Wang, T.-M. Lu, C. Jezewski, W. A. LanfordVolume:
11
Year:
2005
Language:
english
Pages:
7
DOI:
10.1002/cvde.200306312
File:
PDF, 527 KB
english, 2005