CVD with Tri-nbutylphosphine Silver(I) Complexes: Mass...

Chemical Vapor Deposition 2005 Vol. 11; Iss. 4

CVD with Tri-nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

T. Haase, K. Kohse-Höinghaus, N. Bahlawane, P. Djiele, A. Jakob, H. Lang
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Volume:
11
Year:
2005
Language:
english
Pages:
11
DOI:
10.1002/cvde.200406339
File:
PDF, 589 KB
english, 2005
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