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High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors
J. Päiväsaari, J. Niinistö, K. Arstila, K. Kukli, M. Putkonen, L. NiinistöVolume:
11
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/cvde.200506396
File:
PDF, 327 KB
english, 2005