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Thick Silicon Carbide Homoepitaxial Layers Grown by CVD Techniques
A. Henry, J. ul Hassan, J. P. Bergman, C. Hallin, E. JanzénVolume:
12
Year:
2006
Language:
english
Pages:
8
DOI:
10.1002/cvde.200606470
File:
PDF, 530 KB
english, 2006