Plasma-Enhanced Atomic Layer Deposition of Palladium on a...

Chemical Vapor Deposition 2007 Vol. 13; Iss. 6-7

Plasma-Enhanced Atomic Layer Deposition of Palladium on a Polymer Substrate

G. A. Ten Eyck, S. Pimanpang, J. S. Juneja, H. Bakhru, T.-M. Lu, G.-C. Wang
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Volume:
13
Year:
2007
Language:
english
Pages:
5
DOI:
10.1002/cvde.200606508
File:
PDF, 253 KB
english, 2007
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