Atomic Layer Deposition of BaTiO3 Thin Films—Effect of Barium Hydroxide Formation
M. Vehkamäki, T. Hatanpää, M. Ritala, M. Leskelä, S. Väyrynen, E. RauhalaVolume:
13
Year:
2007
Language:
english
Pages:
8
DOI:
10.1002/cvde.200606538
File:
PDF, 394 KB
english, 2007