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Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function
M. Camero, F. J. Gordillo-Vázquez, C. Gómez-AleixandreVolume:
13
Year:
2007
Language:
english
Pages:
9
DOI:
10.1002/cvde.200606554
File:
PDF, 688 KB
english, 2007