Analysis of Al2O3 Atomic Layer Deposition on ZrO2...

Chemical Vapor Deposition 2007 Vol. 13; Iss. 9

Analysis of Al2O3 Atomic Layer Deposition on ZrO2 Nanoparticles in a Rotary Reactor

J. A. McCormick, K. P. Rice, D. F. Paul, A. W. Weimer, S. M. George
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Year:
2007
Language:
english
Pages:
8
DOI:
10.1002/cvde.200606563
File:
PDF, 781 KB
english, 2007
Conversion to is in progress
Conversion to is failed