Minimizing the Carbon Content of Thin Ruthenium Films by...

Minimizing the Carbon Content of Thin Ruthenium Films by MOCVD Precursor Complex Design and Process Control

A. Schneider, N. Popovska, I. Jipa, B. Atakan, M. A. Siddiqi, R. Siddiqui, U. Zenneck
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Year:
2007
Language:
english
Pages:
7
DOI:
10.1002/cvde.200606582
File:
PDF, 502 KB
english, 2007
Conversion to is in progress
Conversion to is failed