Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of (Ultra)Nanocrystalline Diamond Films
Maxie Eckert, Erik Neyts, Annemie BogaertsVolume:
14
Year:
2008
Language:
english
Pages:
11
DOI:
10.1002/cvde.200706657
File:
PDF, 199 KB
english, 2008