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Spectroscopic Diagnostics of Pulsed Microwave Plasmas used for Nanocrystalline Diamond Growth
Fabien Bénédic, Xavier Duten, Ousmane Syll, Guillaume Lombardi, Khaled Hassouni, Alix GicquelVolume:
14
Year:
2008
Language:
english
Pages:
8
DOI:
10.1002/cvde.200706658
File:
PDF, 252 KB
english, 2008