PECVD Siloxane and Fluorine-Based Copolymer Thin Films

Chemical Vapor Deposition 2008 Vol. 14; Iss. 9-10

PECVD Siloxane and Fluorine-Based Copolymer Thin Films

Hao Jiang, Kurt Eyink, John T. Grant, Jesse Enlow, Scott Tullis, Timothy J. Bunning
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Volume:
14
Year:
2008
Language:
english
Pages:
6
DOI:
10.1002/cvde.200806684
File:
PDF, 227 KB
english, 2008
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