Plasma-Enhanced Atomic Layer Deposition of Semiconductor...

Chemical Vapor Deposition 2009 Vol. 15; Iss. 1-3

Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc

Pieter C. Rowlette, Cary G. Allen, Olivia B. Bromley, Amy E. Dubetz, Colin A. Wolden
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Volume:
15
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/cvde.200806725
File:
PDF, 230 KB
english, 2009
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