Deposition of Mo Oxide and Metallic Mo Films by Chemical...

Chemical Vapor Deposition 2009 Vol. 15; Iss. 7-9

Deposition of Mo Oxide and Metallic Mo Films by Chemical Vapor Transport of MoO3(OH)2

Young Jung Lee, Young Ik Seo, Se Hoon Kim, Dae-Gun Kim, Young Do Kim
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Volume:
15
Year:
2009
Language:
english
Pages:
5
DOI:
10.1002/cvde.200906738
File:
PDF, 728 KB
english, 2009
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