Construction of an Asymptotic Model for the Oxidation...

Construction of an Asymptotic Model for the Oxidation Process of Silicon

W. Merz, K. Pulverer, B. Stoth
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Volume:
78
Year:
1998
Language:
english
Pages:
10
DOI:
10.1002/(sici)1521-4001(199810)78:103.0.co;2-3
File:
PDF, 212 KB
english, 1998
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