ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik
1998 Vol. 78; Iss. 10
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Construction of an Asymptotic Model for the Oxidation Process of Silicon
W. Merz, K. Pulverer, B. StothVolume:
78
Year:
1998
Language:
english
Pages:
10
DOI:
10.1002/(sici)1521-4001(199810)78:103.0.co;2-3
File:
PDF, 212 KB
english, 1998