Layer-by-Layer Growth of GeSbTe Thin Films by Metal-Organic CVD for Phase Change Memory Applications
Ran-Young Kim, Ho-Gi Kim, Kyoung-Woo Park, Jun-Ku Ahn, Soon-Gil YoonVolume:
15
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/cvde.200906791
File:
PDF, 277 KB
english, 2009